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Introduction

Professors

          - Dr E Soleimani

          -Dr S Mohajerzadeh

Publications

Members

          Jaber Derakhshandeh

          Bahareh Sadeghi Makki

          Shaya Famini

          Bahman Hekmatshoar-Tabari

          Ashkan Behnam

          Roohollah Samadzadeh  Tarighat

          Behzad Esfandyarpour

          Davood Shahrjerdi

          Amir Goodarzi

          Javad koohsorkhi

          Arash Akhavan Fomani

          Hadi Hosseinzadegan

          Behnaz Arvan

          Bahram Ganjipour         

          Fatemeh Dehghan Nayeri

 Laboratories

1-Deposition and lithography Room

        -Electron Beam (E-beam)

                Sputtering-         

        -Dektak

        -PECVD

        -Mask Aligner

        - DC-PECVD

2-Clean Room

        -Water Distiller/Sanitizer

        -SEM

        -SPINNER

        -Chemical Vapor Deposition (CVD)
 

        -Mask Aligner

3-Characterization Room

        -Four-Point Probe

        -Bonder             

 Projects  

        Nanotechnology's group
 

               1- Nanotube devices

               2- Nanolithography

               3- Photonic crystal 

                 Silicon Crystallization methods

                            a) Field assisted crystallization       

            b) UV assisted crystallization       

            c) Stress assisted crystallization        

 Thin Film Transistors       

            a) Back gate poly TFT       

            b) Top gate poly TFT       

            c) Vertical transistors       

            d) Flexible transistors       

DC Plasma Display Panels on Glass and Plastic Substrates       
 

Ultra-Violet assisted PET micromachining-       

Vertical  etching of PET by means of DMF and Ultra-Violet illumination-               

Fabrication of plastic micro gears -               

Realization of RF modules using vertical etching of PET-               

Silicon micromachining-       

Anisotropic etching of <111> Si with acidic solutions-               

Investigation Significant facts in wet vertical etching of Si with the aid of UV illumination-               

.Pursuing  the effect of hydrogenation in etching of mono crystal Si-               

RF integrated modules-       

Design and fabrication of planar thin film integrated inductors-               

Realization of fully 3D MEMS inductors and capacitors by means of vertical etching of PET-               

 Outreach

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