1-Deposition and lithography Room

        -Electron Beam (E-beam)

                Sputtering-         

        -Dektak

        -PECVD

        -Mask Aligner

        - DC-PECVD

2-Clean Room

        -Water Distiller/Sanitizer

        -SEM

        -SPINNER

        -Chemical Vapor Deposition (CVD)
 

        -Mask Aligner

3-Characterization Room

        -Four-Point Probe

        -Bonder             

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