Thin Film Laboratories

University of Tehran

 

 

University of Tehran

 

   

 

Behnaz Arvan

 

 

 

EDUCATION

 

B.Sc. (Physics)

International University of Emam Khomeyni, Qazvin.

Project: Study of the quantum-mechanical modeling and formulation of scattering mechanisms in solids.

 

 

 

M.Sc. (Solid-State Physics)

University of Tehran, Tehran, IRAN.

Thesis Project:  Deposition of high-k dielectrics on silicon wafers.

Area of Research: Semiconductor devices and materials.

 

SUMMARY OF QUALIFICATIONS

 

1     Experience in chemical vapor deposition of silicon dioxide thin films.

2     Familiar with thin film transistor fabrication and characterization.

3     Extensive experience in low-temperature chemical vapor deposition of high-k titanium dioxide films on flexible PET

          substrates.

4     Familiar with standard silicon fabrication technology (including MOSFET fabrication).

5     Extensive experience in CV measurement and electrical characterization of dielectrics.

6     Experience in fabrication of plasma display panels (PDP) on flexible PET substrates.

7     Experience in fabrication of thin-film tunneling transistors.

8     Familiarity with operation and application of radio-telescopes.

9     Experience in photo-induced selective etching of polymer films.

10   Experience in quantum-mechanical modeling and formulation of various scattering mechanisms in solids.

11   Extensive experience in fabrication of pressure sensors (Map sensors) on silicon membrane.

12   Experience in fabrication of atom-probe tips by growing of carbon nano-structures on micro-cantilever made from silicon.

 

  

WORK EXPERIENCE

June 2002-to date                                                        

1. Development of a new technique for low-temperature deposition of TiO2 on flexible PET substrates.

2. Extensive study of the effects of H2O2 incorporation as the carrier gas on the rate, quality and surface

       roughness of the deposited TiO2 films.

3. Fabrication of lateral pixel structure for PDP on rigid and flexible substrates.

4. Fabrication and modeling of thin-film tunneling transistors.

5. Fabrication of pressure sensors (map sensors) on silicon membrane.

6. Fabrication of atom-probe tips on micro-cantilever made from silicon.

 

 

Patent

 

S. Mohajerzadeh, R. Tarighat, A. Goodarzi, B. Arvan  and A. Akhavan, “Flexible plasma display panels with a lateral DC structure” US patent being filed.

 

 

 

 PUBLICATIONS  

 

 

Journals

1.       R. Tarighat, B. Arvan, M. Monavari, S. Mohajerzadeh and A. Goodarzi, “Fabrication of Lateral DC Plasma Display Panels with a Novel pixel structure”, published in IEEE Trans. on Electron Devices.

2.      B. Arvan, A.Khakifirooz, R. Tarighat, S. Mohajerzadeh, A. Goodarzi, E. Arzi, “Atmosoheric pressure chemical vapor deposition of titanium dioxide films from TiCl4”, published in Materials Science and Engineering B, Vol.109, June 2004.

3.      R.S. Tarighat, A. Goodarzi, S. Mohajerzadeh, B. Arvan , M.R. Ghaderi and M. Fathipour, “Realization of Flexible Plasma Display Panels on PET substrates”, to be published in IEEE Proceeding (Special Issue on Flexible Electronics Technology , July 2005)

 

Confereces

 

  1.A. Khakifirooz, B. Arvan, R. Tarighat, and S. Mohajerzadeh, “Atmospheric pressure chemical vapor deposition of

        titanium oxide films from TiCl4”,  presented at EMRS, 2003, Strasbourg.

2.      B. Arvan, S. Mohajerzadeh T. Arzi, “Study of titanium oxide films on plastic grown using a low temperature CVD

        technique”, presented at annual Iranian Physics conference, Tabriz, Iran

3.      R. Tarighat, B. Arvan, M. Monavary, S. Mohajerzadeh, A. Goodarzi and M. Yousefi, “Fabrication of Lateral DC

        Plasma Display Panels on Flexible Substrates”, presented to International Conference On Plasma Science (ICOPS),

        June 2004, Baltimore, Maryland.

4.      A. Behnam, B. Hekmatshoar, S. Mohajerzadeh, B. Arvan, F. Karbassian and E. Asl. Soleimani, “TiO2-based tunneling

        transistors on silicon substrates”, proceedings of the Material Research Society, 2004 Spring Meeting, San Francisco,

        CA., vol. 811, April 2004.

5.      B. Arvan, S. Mohajerzadeh, N. Izadi, Y. Abdi, S.Darbari, E. Arzi,  “Growth of carbon nano-structures and their

        alloys on micro-cantilever made from silicon to fabricate atom-probe tips presented at condensed matter

         conference (2005) Iran.

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 
 
 
 
 
 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 
 

 

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