Thin Film Laboratories

University of Tehran

 

 

University of Tehran

 

   
 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

Bahman Hekmatshoar-Tabari

 

 

 

 

Summary of Interests

 

§         Stress-assisted crystallization of germanium by manipulating mechanical stress to flexible substrates.

§         Fabrication of poly-germanium thin-film transistors on flexible substrates.

§         Simulation of semiconductor devices with Dessis and Medici.

§         Stress-assisted crystallization of Si-Ge alloys and lateral crystallization of Ge.

§         Analytical mobility modeling in ultra-thin SOI.

§         Fabrication and modeling of thin-film tunneling transistors.

 

 

JOURNAL PUBLICATIONS

 

·         D. Shahrjerdi, B. Hekmatshoar, S. Mohajerzadeh and L. Rezaee, “Low temperature stress-induced crystallization of germanium on plastic”, Thin Solid Films, vol. 427, pp. 330-334, March 2003

·         B. Hekmatshoar, D. Shahrjerdi, S. Mohajerzadeh, A. Khakifirooz, A. Goodarzi and M. Robertson, “Low temperature crystallization of amorphous germanium on plastic, by means of externally applied compressive stress” Journal of Vacuum Science and Technology A, vol. 21, no. 3, pp. 752-755, May/June 2003

·         B. Sadeghi, M. Moradi, A. Moafi, S. Mohajerzadeh, B. Hekmatshoar and D. Shahrjerdi, “Fabrication of Poly-Ge Based Thermopiles on Plastic”, IEEE Sensors Journal, to be published.

·         B. Hekmatshoar, D. Shahrjerdi, S. Mohajerzadeh, A. Khakifirooz, M. Robertson, A. Tonita and   J.C. Bennett, “Low Temperature Stress-Assisted Germanium-Induced Crystallization of Silicon-Germanium Alloys on Flexible PET substrates”, Journal of Vacuum Science and Technology A, vol. 22, no. 3, pp. 856-858, May-June 2004

·         D. Shahrjerdi, B. Hekmatshoar, S. S. Mohajerzadeh, A. Khakifirooz and M. Robertson, “High Mobility Poly-Ge TFTs Fabricated on Flexible Plastic Substrates at Temperatures below 130˚C”, Journal of Electronic Materials, vol. 33, no. 4, pp. 353-357, April 2004

·         D. Shahrjerdi, M. Fathipour, B. Hekmatshoar and A. Khakifirooz, “An Approach to Low-cost Fabrication of Lateral COOLMOS Structures”, Solid State Electronics, to be published, vol. 48, no. 10-11, pp. 1953-1957, October-November 2004

·         B. Hekmatshoar, S. Mohajerzadeh, D. Shahrjerdi,  and M. Robertson, “Thin-Film Tunneling Transistors on Flexible Plastic Substrates based on Stress-Assisted Lateral Growth of Poly-Germanium”, Applied Physics Letters, vol. 85, no. 6, pp. 1054-1057, August 2004

·         D. Shahrjerdi, B. Hekmatshoar, A. Afzali-Kusha and A. Khakifirooz, “Optimization of the VT­control method for low-power ultra-thin double-gate SOI logic circuits”, Integration, the VLSI Journal, to be published

·         B. Hekmatshoar, A. Khajooeizadeh, S. Mohajerzadeh, D. Shahrjerdi and E. Asl-Soleimani, “Low temperature non-metal-induced crystallization of germanium for fabrication of thin-film transistors”, Materials Science in Semiconductor Processing, to be published

·         B. Hekmatshoar, S. Mohajerzadeh, D. Shahrjerdi, A. Afzali-Kusha, M.D. Robertson and A. Tonita, “Low temperature copper-induced lateral growth of polycrystalline germanium assisted by external compressive stress”, Journal of Applied Physics, submitted for publication 

 

 

INTERNATIONAL CONFERENCES  

 

·         B. Hekmatshoar, D. Shahrjerdi, S. Mohajerzadeh and E. Asl-Soleimani “Low temperature stress-induced crystallization of germanium on plastic”, presented at European Material Research Society, Strasburg, France, June 2002.

·         B. Hekmatshoar, D. Shahrjerdi, S. Mohajerzadeh, A. Khakifirooz, A. Akhavan and M. Robertson, “Low-temperature Copper-induced Crystallization Technique for Germanium on Flexible PET, by Means of External Compressive Stress”, Proceedings of the Material Research Society Spring Meeting, San Francisco, CA., vol. 769, pp. 183-188, April 2003

·         D. Shahrjerdi, B. Hekmatshoar, S. Mohajerzadeh and A. Khakifirooz, “High Mobility Poly-Ge TFTs on Flexible Plastic Fabricated at 130˚C”, Proceedings of the Device Research Conference, Salt Lake City, UT, pp. 85-86, June 2003

·         B. Hekmatshoar, D. Shahrjerdi, S. Mohajerzadeh, A. Khakifirooz, M. Robertson, A. Tonita and   J.C. Bennett, “Low Temperature Stress-Assisted Germanium-Induced Crystallization of Silicon-Germanium Alloys on Flexible Plastic”, Presented at the Canadian Semiconductor Technology Conference, Ottawa, Canada, August 2003

·         B. Hekmatshoar, D. Shahrjerdi, S. Mohajerzadeh, A. Khakifirooz and A. Afzali-Kusha, “Stress-assisted Copper-induced Lateral Growth of Polycrystalline Germanium”, proceedings of the Material Research Society Fall Meeting, Boston MA, vol. 795, pp. 199-204, December 2003

·         B. Esfandyarpour, S. Mohajerzadeh, B. Hekmatshoar, M. Moradi and A. Khodadadi, “SnO2/Pt Micro-sensors Fabricated on Micro-machined Si <100> Suitable for Low-temperature Silicon Processing”, proceedings of IEEE Sensors, Toronto, Canada, vol. 1, pp. 148-151, October 2003 

·         B. Hekmatshoar and C. Lucas, “An Object-oriented Design Paradigm for Standard CMOS Fabrication Technology”, proceedings of the International Conference on Microelectronics, Cairo, Egypt, pp. 353-356, December 2003

·         D. Shahrjerdi, B. Hekmatshoar, S. Mohajerzadeh and S. Darbari, “Low-temperature Fabrication of High-mobility TFTs on Flexible Plastic”, proceedings of the International Conference on Microelectronics, Cairo, Egypt, pp. 361-364, December 2003

·         D. Shahrjerdi, B. Hekmatshoar and A. Shoaei, “A Fast Settling, High DC Gain, Low Power OPAMP Design for High Resolution, High Speed A/D Converters”, proceedings of the International Conference on Microelectronics, Cairo, Egypt, pp. 207-210, December 2003

·         D. Shahrjerdi, B. Hekmatshoar, A. Khakifirooz and M. Fathipour, “An Approach to Low-cost Fabrication of Lateral COOLMOS Structures”, proceedings of the International Semiconductor Device Research symposium, Washington DC, pp. 272-273, December 2003

·         A. Behnam, B. Hekmatshoar, S. Mohajerzadeh, B. Arvan, F. Karbasian and E. Asl. Soleimani, “TiO2-based tunneling transistors on silicon substrates”, proceedings of the Material Research Society, 2004 Spring Meeting, San Francisco, CA., vol. 811, April 2004

·         B. Hekmatshoar, D. Shahrjerdi, S. Mohajerzadeh, A. Khakifirooz and M.D. Robertson, “Poly germanium and germanium-silicon alloys on plastic for realization of thin film transistors”, proceedings of the Material Research Society, 2004 Spring Meeting, San Francisco, CA., vol. 814, April 2004

·         D. Shahrjerdi, B. Hekmatshoar, A. Khakifirooz and A. Afzali-Kusha, “Power Optimization in Ultra-Thin DG SOI Logic Circuits by Means of VT-Control Method”, proceedings of the 2004 ACM Great Lake Symposium on VLSI, Boston, MA., pp. 236-239, April 2004

·         B. Hekmatshoar, D. Shahrjerdi, S. Mohajerzadeh, A. Khakifirooz, M. Robertson, J.C. Bennett and   A. Tonita, “Scanning and Transmission Electron Microscopy Study of Stress-assisted Crystallization of Ge and SiGe on Plastic Substrates”, Presented at the 31st Annual Meeting of the Microscopical Society of Canada, May 2004

·         B. Hekmatshoar, D. Shahrjerdi, S. Mohajerzadeh and E. Asl-Soleimani, “Stress-assisted Lateral Growth of Poly-Germanium for Fabrication of Thin-Film Tunneling Transistors on Flexible Plastic Substrates”, presented at European Material Research Society, Strasburg, France, June 2004

·         D. Shahrjerdi, B. Hekmatshoar, S. Mohajerzadeh and M.D. Robertson, “Low-temperature Fabrication of Poly-Germanium Transistors Suitable for Realization of Simple Inverters on Flexible PET Substrates”, presented at European Material Research Society, Strasburg, France, June 2004

·         B. Hekmatshoar, S. Mohajerzadeh, D. Shahrjerdi and M. Robertson, “Tunneling and Depletion-mode TFTs Fabricated by Low-temperature Stress-assisted Cu-induced Lateral Growth and Metal-free Crystallization of Germanium”, 2004 Device Research Conference, Notre Dame, IN.

 

 

 

 
 
 

 

 

 
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