Bahareh Sadeghi makki

Address: No.48 – Fatemi St. – Ayat Ave. – Nabovat square - Narmak

   Tehran, Iran  (1648746911)

Phone: (98 21) 780-5550

E-mail: b_sadeghimakki@yahoo.com ; b_sm19@yahoo.com  

  Birthday: 1977

2000-2003       K.N.T University and Technology                      Iran

M.S. / Solid State Physics

1995-1999        Shahid Beheshti University                                Iran                                    

B.S. / Solid state Physics

1        Material science

2        Nanoscience

3        Micro devices and microfabrication process

4        Microelectromechanical systems (MEMs)

5        Micromechanical sensors and actuators

6        Nanofabrication and characterization

7        Photonic devices

8        RF devices

·        UV-assisted anisotropic etching of a flexible substrate (P.E.T) in presence of strong chemical solvents such as DCM and DMF. Using this technique, membranes, gears, axles, molds and motors can be easily made in micron dimensions. It is an ongoing research; I have recently fabricated some gears and axles which are typically of about 300-900 micrometers sizes and I am following the method in order to make an electrostatic micro motor. The final goal is to make a micro robot.

·        Research on semiconductor devices such as nano structures gas sensors, thermal sensors, thin film and tunneling transistors, 3D inductors for RF applications, Liquid Crystal Polymer (LCP), field emission diodes (laser diodes)  and  photonic crystals.

·        Fabrication of poly-germanium based thermocouple on PET substrate by converting the amorphous Ge to polycrystalline film with post-treated. Extracting the Seebeck coefficient for the Ge-Al junctions and measuring sensor’s response to flow.

·        Working with various deposition instruments such as e-beam, sputtering, evaporation and so on which are used in making semiconductor devices like thin film transistors, thermal sensors, thermocouples, displays, etc.

·        Working with PECVD system

·        Familiar with CVD and LPE film growth methods

·        Familiar with clean room facility

·        Familiar with Material characterization instrumentation such as TEM, SEM, RBS, XRD

·        Familiar with SPM system

·        Working with Origin, Matlab, Mathematica.

·        Experienced with Microsoft Word, Excel, Visio, PowerPoint, etc.

·        Working with graphical packages such as Photoshop, Freehand and some mechanical packages like AutoCAD and Mechanical desktop.

              Micromachining of Liquid Crystal Polymer (LCP). (US. PATENT being filed)

Teaching Physics, Calculus, Mathematics, Algebra, Chemistry and geometry courses in pre-universities for the students getting ready for the university’s entrance exam.

October 2001-to date   Research assistant, Thin Film Lab., University of Tehran

            May 2003-to date Research assistant, Semiconductor Laser Research Lab., Tehran

·        B. Sadeghi Makki, M. Moradi, A. Moafi, S. Mohajerzadeh, B. Hekmatshoar and D. Shahrjerdi “Fabrication of poly-germanium based thermopiles on plastic” accepted for publication in IEEE sensors journal.

·        B. Sadeghi Makki, M.R. Ghafouri-Fard, S. Mohajerzadeh, T. Maleki S.Mohammadi, A.M. Miri and E. Asl. Soleimani “A novel ultra-violet assisted anistorpic etching of PET to realize micro-gears” accepted for publication in Journal of Sensors and Actuators.

·        B. Sadeghi Makki, M. Karegar, S. Mohajerzadeh, T. Maleki and D.Shahrjerdi “Application of PET substrate in micro-sensors fabrication” was presented at 15^th International Conference on Microelectronics (ICM03), Cairo, Egypt.  

·        B. Sadeghi Makki, T. Maleki, S. Mohajerzadeh, A. M.Miri, F. Taeedi “Design and Fabrication of thin film thermocouples and use them in miniaturized, vacuum and gas flow sensors” was presented at 6^th Iranian condensed matter conference, Yazd, Iran.

·        T.maleki, B. Sadeghi makki, E. Yousefnegad, M.R. Ghafouri Fard, A. Afzali Koosha, E. Asle Soleimani “A new method in PET etching using UV” was presented at 11th Iranian Conference on Electrical Engineering, May 2003, Shiraz-Iran (ICEE2003)

·        S. Famini, B. Sadeghi makki, S. Mohajerzadeh, B. Fallah and M.Sadeghi “Micro-Mold Fabrication by PET Anisotropic Ultra-Violet Assisted Etching Suitable for 3D Structures on Si” has been accepted for Eurosensors Conference 2004.

·        B. Fallah-Azad, M. Sadeghi, B. Sadeghi-Makki, S. Mohajerzadeh, S. Famini and M. Miri “Micro-gear and micro-mold fabrication on PET using a UV-assisted chemical etching” the abstract has been submitted for IEEE Sensors 2004.